Yale Teaching Cleanroom

Teaching Cleanroom LayoutAbout

The Yale Teaching cleanroom is located in Becton 400. Special access is required, but policies regarding hours and usage are consistent with the University Cleanroom policies. Any registered University Cleanroom members can request a Teaching Cleanroom walkthrough and access from a staff member.


  • Hood #1- For Solvents and Resists
  • Hood #2- For Solvents and Resists
  • Hood #3- For Corrosives
  • HTG Aligner
  • Cooke Vacuum Evaporator
  • Benno Evaporator
  • RIE
  • AG Assoc. Rapid Thermal Anneal
  • Diffusion and Oxidation Furnaces