Equipment Listings and Manuals
Cleanroom staff currently train and service over 30 pieces of equipment in the cleanroom and student cleanroom, divided into seven categories. To request equipment training submit a request over FOM. Be aware that some systems require multiple trainings. Usage rates can be found on the individual equipment pages, or on the rate list.
Facilities
- Yale Institute for Nanoscience and Quantum Engineering (E-Beam, SEM, AFM)
- West Campus Material Characterization Core
- West Campus Cleanroom
Equipment
Tool | Tool Owner | Guide |
---|---|---|
Critial Point Dryer | Yong Sun | |
Lapping and Polishing Tool | Yong Sun | |
LatticeGear Scribing Tools | Yong Sun | |
MA 1006 Dicing Saw | Yong Sun |
Tool | Tool Owner | Guide |
---|---|---|
EasyTube Diffusion Furnace | Yong Sun | |
Fiji Plasma ALD | Yong Sun | |
GSI 2000 PECVD | Kelly Woods | |
SSI Solaris RTA | Yong Sun |
Tool | Tool Owner | Guide |
---|---|---|
AutoGlow 200 Plasma Cleaner | Yong Sun | Video |
Oxford 100 ICP RIE | Yong Sun | Video |
Oxford 80+ ICP RIE | Yong Sun | Video |
Oxford Cryo Bosch DRIE | Yong Sun | Video |
XeF2 Silicon Etcher | Yong Sun |
Tool | Tool Owner | Guide |
---|---|---|
EVG 620 Mask Aligner | Yong Sun | |
Heidelberg DWL-66 Laser Mask Writer | Yong Sun | |
Laurell Spinners | Yong Sun | |
YES HDMS Prime Ovens | Yong Sun |
Tool | Tool Owner | Guide |
---|---|---|
Denton E-Beam Evaporator | Lauren McCabe | |
KJL Sputterer | Lauren McCabe | |
Nano38 Thermal Evaporator | Lauren McCabe | |
PETE E-Beam Evaporator | Lauren McCabe | |
PVD E-Beam Evaporator | Lauren McCabe |