The University Cleanroom has a selection of state of the art metrology equipment, able to perform measurements on samples before, after, and during processing. Basic equipment include a standard optical microscope and four point probe station.

When measuring surface morphology, the simplest method is contact profilometry. For situations where there are no features, or the surface cannot be touched, non-contact reflectometry can offer a solution. When the optical properties of a film are unknown, ellipsometry is also available.