The KLA-Tencor P-7 contact profiler uses a stylus tip to measure step height, waviness, and roughness of samples. It boasts several advanced features, including a vacuum chuck, multiple location scanning, user-adjustable force control, and sub-angstrom vertical resolution. This system requires a pattenered step to measure step height. If one does not exist consider a non-contact method such as ellipsometry, or reflectometry.