Woollam Ellipsometer

The J.A. Woollam M-2000 Ellipsometer is a variable angle spectroscopic ellipsometer. The xenon light source is capable of measuring films from 240 nm to 1200 nm. With a motorized stage and removable hardware the system is capable of quick single-site measurements or full wafer film analysis. Users can perform a thickness fitting using pre-existing material files, or characterize unknown optical constants. In-situ measurement also exists for active experiments.