Quick InfoSummaryThe Denton Infinity 22 deposition system is used for depositing various thin metal and dielectric films. It uses an electron beam and resistive heating to vaporize materials in high vacuum conditions. The electron gun has four pockets for 8 cc crucibles, allowing multiple layers to be deposited in situ under vacuum. Film growth is monitored by quartz crystal monitor. The 10 inch cryo pump attached to the system is capable of achieving a base pressure of 1E-6 Torr over 2 hours. Check with a staff member to determine sample compatibility before processing. DetailsTool Owner: Lauren McCabeInternal Rate: Included with accessAvailable Materials: Ti, Cr, Ni, Al, Pt, Ag, Ge, TiO, Al2O3, Si, Au, Pt Maximum Sample Size: 6”