The Filmetrics F54-UV is a film thickness measurement system that utilizes a small spot spectroscopic reflectometer that is coupled with an intuitive and capable software package. With dual halogen and deuterium lamps, the system takes precise measurements of single and multi-layer film stacks, measuring thicknesses ranging from 4 nanometers to 35 microns. The software allows the user to configure measurement recipes for both simple and advanced measurement applications with the ability to select film constants, scan ranges and substrate types. Additionally, the motorized stage allows for measurement of virutally any substrate, and the 25 micron spot size allows for the analysis of patterned films.