This is a four tube diffusion furnace for growing oxides, diffusions, and annealing. Two of the tubes are capable of growing oxides using hydrogen and oxygen to form steam (wet oxidation), or using strictly oxygen (dry oxidation). All tubes are sealed during process and prepurged with inert gas before admitting process gas. The computer interface allows recipe editing and data logging of the process in each tube, a system control program monitors all vital services to furnace and safety features.