Gases: O2, Ar, N2, N2/H2 (Forming Gas)
Wafer sizes: 2”, 3”, 4”, 5” and 6” wafers and pieces
Ramp up rate: 1-200°C per second
Steady state duration: 0-600 seconds per step
Ramp down rate: Temperature Dependent, max 150°C per second
Recommended steady state temperature range: 200°C - 1250°C
Thermocouple temperature accuracy: +/- 2.5°C
Temperature repeatability: +/- 3°C or better at 1150°C wafer-to-wafer
Temperature uniformity @ 1150°C: +/- 5°C across a 6” (150 mm) wafer