Quick InfoSummaryFrom Veeco’s Product Page: Our Fiji® series is a modular, high-vacuum ALD system that accommodates a wide range of deposition modes using a flexible architecture and multiple configurations of precursors and plasma gases. The result is a next-generation ALD system capable of performing thermal and plasma-enhanced deposition. DetailsTool Owner: Yong SunInternal Rate: Included with accessAvailable Materials: AlN, AlO, HfO, SiN, SiO, NbN, TiO