AutoGlow 200 Plasma Cleaner

Quick Info

Summary

The AutoGlow 200 is a basic plasma asher, enabled with O2 and Ar for substrate cleaning, descumming, and surface treatment. It can operate between 50 W and 300 W, typically at 300 mTorr. The two-level table design creates separate zones for high power film removal and low power cleaning. Note that the relationship between power and etch rate aren’t necessarily linear.

Details
Internal Rate: 
Included with access

RIE Power: 50 W - 300 W
Allowed Materials: Most materials. Check with a staff member before using.